Highlights
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Automatic/Semi-automaticSupports automatic and semi-automatic wafer loading and unloading
Compatible with 12-inch and 8-inch wafers
Wafer thickness 200μm - 2000μm -
Edge couplingReal-time monitoring of height using nano displacement sensors to reduce the risk of damaging optical fibers
High-precision vision system, reducing errors caused by small angles -
Vertical couplingAlignment of wafer level grating couplers using vertical coupling method
Supports spiral scanning and gradient scanning (coupling time <1.5 s) -
Automated fiber calibrationAutomated calibration script, angle calibration of the fiber array can be completed within 3 mins
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Modular platform softwareSupports Notch Up/Down continuous testing, no need to reload wafer, saving testing time Integrates most of the current silicon photonic wafer testing items cover O/O, E/E and O/E testing
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Self-developed SMUHigh-precision 12-channel card-type SMU, high integration, saving machine space ±10 V, 50mA, the range perfectly covers the silicon light testing requirements
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Equipped with a height sensorSolves the flatness variation issue of the wafer on the chuck
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Test temperature rangeRoom temperature 25°~150°
(other temperatures can be customized)
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